3D Patterning of Si by Contact Etching With Nanoporous Metals

por Bastide, Stéphane, Torralba, Encarnacion, Halbwax, Mathieu, Le Gall, Sylvain, Mpogui, Elias, Cachet-Vivier, Christine, Magnin, Vincent, Harari, Joseph, Yarekha, Dmitri, Vilcot, Jean-Pierre
Publicado 2019