Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

por Awad, Mohammed, Workie, Temesgen Bailie, Bao, Jingfu, Hashimoto, Ken-ya
Publicado 2023

Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

por Awad, Mohammed, Workie, Temesgen Bailie, Bao, Jing-Fu, Hashimoto, Ken-ya
Publicado 2023

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

por Workie, Temesgen Bailie, Wu, Zhaohui, Tang, Panliang, Bao, Jingfu, Hashimoto, Ken-ya
Publicado 2022

Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure

por Liu, Jiacheng, Workie, Temesgen Bailie, Wu, Ting, Wu, Zhaohui, Gong, Keyuan, Bao, Jingfu, Hashimoto, Ken-ya
Publicado 2020