Development of a Silicon Based Electron Beam Transmission Window for Use in a KrF Excimer Laser System

por Gentile, C A, Fan, H M, Hartfield, J W, Hawryluk, R J, Hegeler, F, Heitzenroeder, P J, Jun, C H, Ku, L P, Lamarche, P H, Myers, M C, Parker, J J, Parsells, R F, Payen, M, Raftopoulos, S, Sethian, J D
Publicado 2002