Standard CMOS Fabrication of a Sensitive Fully Depleted Electrolyte-Insulator-Semiconductor Field Effect Transistor for Biosensor Applications

por Shalev, Gil, Cohen, Ariel, Doron, Amihood, Machauf, Andrew, Horesh, Moran, Virobnik, Udi, Ullien, Daniela, Levy, Ilan
Publicado 2009