Single-Grain Gate-All-Around Si Nanowire FET Using Low-Thermal-Budget Processes for Monolithic Three-Dimensional Integrated Circuits

por Hsieh, Tung-Ying, Hsieh, Ping-Yi, Yang, Chih-Chao, Shen, Chang-Hong, Shieh, Jia-Min, Yeh, Wen-Kuan, Wu, Meng-Chyi
Publicado 2020