Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask

por Liu, Xiangyue, Zhang, Zhe, Song, Hongxuan, Huang, Qiushi, Huo, Tonglin, Zhou, Hongjun, Qi, Runze, Zhang, Zhong, Wang, Zhanshan
Publicado 2023

Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask

por Lin, Dakui, Liu, Zhengkun, Dietrich, Kay, Sokolov, Andréy, Sertsu, Mewael Giday, Zhou, Hongjun, Huo, Tonglin, Kroker, Stefanie, Chen, Huoyao, Qiu, Keqiang, Xu, Xiangdong, Schäfers, Franz, Liu, Ying, Kley, Ernst-Bernhard, Hong, Yilin
Publicado 2019