Surface Passivation of III–V GaAs Nanopillars by Low-Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices

por Jacob, Bejoys, Camarneiro, Filipe, Borme, Jérôme, Bondarchuk, Oleksandr, Nieder, Jana B., Romeira, Bruno
Publicado 2022