Plasma functional polymerization of dopamine using atmospheric pressure plasma and a dopamine solution mist

por Mun, Mu Kyeom, Jang, Yun Jong, Kim, Ju Eun, Yeom, Geun Young, Kim, Dong Woo
Publicado 2019

Selective isotropic etching of SiO(2) over Si(3)N(4) using NF(3)/H(2) remote plasma and methanol vapor

por Gil, Hong Seong, Kim, Doo San, Jang, Yun Jong, Kim, Dea Whan, Kwon, Hea In, Kim, Gyoung Chan, Kim, Dong Woo, Yeom, Geun Young
Publicado 2023

Reactive ion etching of an ovonic threshold switch (OTS) material using hydrogen-based plasmas for non-volatile phase change memories

por Kim, Doo San, Kim, Ju Eun, Gill, You Jung, Park, Jin Woo, Jang, Yun Jong, Kim, Ye Eun, Choi, Hyejin, Kwon, Oik, Yeom, Geun Young
Publicado 2020