New Volatile Tantalum Imido Precursors with Carboxamide Ligands

por Hwang, Jeong Min, Lee, Sung Kwang, Shin, Sunyoung, Jeong, Ji-Seoung, Kim, Hae Sun, Ryu, Ji Yeon, Eom, Taeyong, Park, Bo Keun, Kim, Chang Gyoun, Chung, Taek-Mo
Publicado 2021