Growth of GaN Thin Films Using Plasma Enhanced Atomic Layer Deposition: Effect of Ammonia-Containing Plasma Power on Residual Oxygen Capture

por Jiang, Shicong, Wu, Wan-Yu, Ren, Fangbin, Hsu, Chia-Hsun, Zhang, Xiaoying, Gao, Peng, Wuu, Dong-Sing, Huang, Chien-Jung, Lien, Shui-Yang, Zhu, Wenzhang
Publicado 2022