Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

por Biegger, Felix, Jungwirth, Felix, Seifner, Michael Stanislaus, Rameshan, Christoph, Barth, Sven
Publicado 2017

Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes

por Jungwirth, Felix, Knez, Daniel, Porrati, Fabrizio, Schuck, Alfons G., Huth, Michael, Plank, Harald, Barth, Sven
Publicado 2022

Mixed-Substituted Single-Source Precursors for Si(1–x)Ge(x) Thin Film Deposition

por Köstler, Benedikt, Jungwirth, Felix, Achenbach, Luisa, Sistani, Masiar, Bolte, Michael, Lerner, Hans-Wolfram, Albert, Philipp, Wagner, Matthias, Barth, Sven
Publicado 2022