Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO(2) ALD Properties for Improved Electrical and Reliability Parameters

por Falidas, Konstantinos Efstathios, Kühnel, Kati, Rudolph, Matthias, Everding, Maximilian B., Czernohorsky, Malte, Heitmann, Johannes
Publicado 2022