Proximity Gettering Design of Hydrocarbon–Molecular–Ion–Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors

por Kurita, Kazunari, Kadono, Takeshi, Shigematsu, Satoshi, Hirose, Ryo, Okuyama, Ryosuke, Onaka-Masada, Ayumi, Okuda, Hidehiko, Koga, Yoshihiro
Publicado 2019

Reduction of Dark Current in CMOS Image Sensor Pixels Using Hydrocarbon-Molecular-Ion-Implanted Double Epitaxial Si Wafers

por Onaka-Masada, Ayumi, Kadono, Takeshi, Okuyama, Ryosuke, Hirose, Ryo, Kobayashi, Koji, Suzuki, Akihiro, Koga, Yoshihiro, Kurita, Kazunari
Publicado 2020

Reduction of White Spot Defects in CMOS Image Sensors Fabricated Using Epitaxial Silicon Wafer with Proximity Gettering Sinks by CH(2)P Molecular Ion Implantation

por Kadono, Takeshi, Hirose, Ryo, Onaka-Masada, Ayumi, Kobayashi, Koji, Suzuki, Akihiro, Okuyama, Ryosuke, Koga, Yoshihiro, Fukuyama, Atsuhiko, Kurita, Kazunari
Publicado 2022