The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

por Tordoff, Ben, Hartfield, Cheryl, Holwell, Andrew J., Hiller, Stephan, Kaestner, Marcus, Kelly, Stephen, Lee, Jaehan, Müller, Sascha, Perez-Willard, Fabian, Volkenandt, Tobias, White, Robin, Rodgers, Thomas
Publicado 2020

Charged particle single nanometre manufacturing

por Prewett, Philip D, Hagen, Cornelis W, Lenk, Claudia, Lenk, Steve, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W, Shi, Xiaoqing, Boden, Stuart A, Robinson, Alex P G, Yang, Dongxu, Hari, Sangeetha, Scotuzzi, Marijke, Huq, Ejaz
Publicado 2018