Robust Co alloy design for Co interconnects using a self-forming barrier layer

por Kim, Cheol, Kang, Geosan, Jung, Youngran, Kim, Ji-Yong, Lee, Gi-Baek, Hong, Deokgi, Lee, Yoongu, Hwang, Soon-Gyu, Jung, In-Ho, Joo, Young-Chang
Publicado 2022