High-Speed Focus Inspection System Using a Position-Sensitive Detector

por Cao, Binh Xuan, Hoang, Phuong Le, Ahn, Sanghoon, Kang, Heeshin, Kim, Jengo, Noh, Jiwhan
Publicado 2017

In-Situ Real-Time Focus Detection during Laser Processing Using Double-Hole Masks and Advanced Image Sensor Software

por Cao, Binh Xuan, Hoang, Phuong Le, Ahn, Sanghoon, Kim, Jeng-o, Kang, Heeshin, Noh, Jiwhan
Publicado 2017