Polymer link breakage of polyimide-film-surface using hydrolysis reaction accelerator for enhancing chemical–mechanical-planarization polishing-rate

por Jeong, Gi-Ppeum, Park, Jun-Seong, Lee, Seung-Jae, Kim, Pil-su, Han, Man-Hyup, Hong, Seong-Wan, Kim, Eun-Seong, Park, Jin-Hyung, Choo, Byoung-Kwon, Kang, Seung-Bae, Park, Jea-Gun
Publicado 2022