AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing

por Kao, Wei-Chung, Lee, Wei-Hao, Yi, Sheng-Han, Shen, Tsung-Han, Lin, Hsin-Chih, Chen, Miin-Jang
Publicado 2019

Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing

por Shih, Huan-Yu, Lee, Wei-Hao, Kao, Wei-Chung, Chuang, Yung-Chuan, Lin, Ray-Ming, Lin, Hsin-Chih, Shiojiri, Makoto, Chen, Miin-Jang
Publicado 2017