One-Step Etching Characteristics of ITO/Ag/ITO Multilayered Electrode in High-Density and High-Electron-Temperature Plasma

por Yoon, Ho-Won, Shin, Seung-Min, Kwon, Seong-Yong, Cho, Hyun-Min, Kim, Sang-Gab, Hong, Mun-Pyo
Publicado 2021