Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

por Bertke, Maik, Kirsch, Ina, Uhde, Erik, Peiner, Erwin
Publicado 2021

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

por Setiono, Andi, Bertke, Maik, Nyang’au, Wilson Ombati, Xu, Jiushuai, Fahrbach, Michael, Kirsch, Ina, Uhde, Erik, Deutschinger, Alexander, Fantner, Ernest J., Schwalb, Christian H., Wasisto, Hutomo Suryo, Peiner, Erwin
Publicado 2020