Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

por Sahoo, Bichitra Nanda, Han, So Young, Kim, Hyun-Tae, Ando, Keita, Kim, Tae-Gon, Kang, Bong-Kyun, Klipp, Andreas, Yerriboina, Nagendra Prasad, Park, Jin-Goo
Publicado 2021