Universal perpendicular orientation of block copolymer microdomains using a filtered plasma

por Oh, Jinwoo, Suh, Hyo Seon, Ko, Youngpyo, Nah, Yoonseo, Lee, Jong-Chan, Yeom, Bongjun, Char, Kookheon, Ross, Caroline A., Son, Jeong Gon
Publicado 2019