Enhanced Wettability, Hardness, and Tunable Optical Properties of SiC(x)N(y) Coatings Formed by Reactive Magnetron Sputtering

por Sulyaeva, Veronica S., Kolodin, Alexey N., Khomyakov, Maxim N., Kozhevnikov, Alexander K., Kosinova, Marina L.
Publicado 2023