Nanoporous Metal–Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

por Multia, Jenna, Kravchenko, Dmitry E., Rubio-Giménez, Víctor, Philip, Anish, Ameloot, Rob, Karppinen, Maarit
Publicado 2023