Study of Si and Ge Atoms Termination Using H-Dilution in SiGe:H Alloys Deposited by Radio Frequency (13.56 MHz) Plasma Discharge at Low Temperature

por Cosme, Ismael, Kosarev, Andrey, Zarate-Galvez, Saraí, Martinez, Hiram E., Mansurova, Svetlana, Kudriavtsev, Yuri
Publicado 2020