Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopy

por Kwon, Yena, An, Byeong-Seon, Shin, Yeon-Ju, Yang, Cheol-Woong
Publicado 2020

Amorphous Ta(x)Mn(y)O(z) Layer as a Diffusion Barrier for Advanced Copper Interconnects

por An, Byeong-Seon, Kwon, Yena, Oh, Jin-Su, Lee, Miji, Pae, Sangwoo, Yang, Cheol-Woong
Publicado 2019

Evaluation of ion/electron beam induced deposition for electrical connection using a modern focused ion beam system

por An, Byeong-Seon, Kwon, Yena, Oh, Jin-Su, Shin, Yeon-Ju, Ju, Jae-seon, Yang, Cheol-Woong
Publicado 2019