Mapping Oxidation and Wafer Cleaning to Device Characteristics Using Physics-Assisted Machine Learning

por Pratik, Sparsh, Liu, Po-Ning, Ota, Jun, Tu, Yen-Liang, Lai, Guan-Wen, Ho, Ya-Wen, Yang, Zheng-Kai, Rawat, Tejender Singh, Lin, Albert S.
Publicado 2022