Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration

por Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Publicado 2018

A small-gap electrostatic micro-actuator for large deflections

por Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam
Publicado 2015

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

por Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David
Publicado 2019

Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

por Melnikov, Anton, Schenk, Hermann A. G., Monsalve, Jorge M., Wall, Franziska, Stolz, Michael, Mrosk, Andreas, Langa, Sergiu, Kaiser, Bert
Publicado 2021

The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers

por Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge M., Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald
Publicado 2022