Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH

por Smiljanić, Milče M., Lazić, Žarko, Radjenović, Branislav, Radmilović-Radjenović, Marija, Jović, Vesna
Publicado 2019

Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C

por Smiljanić, Milče M., Lazić, Žarko, Jović, Vesna, Radjenović, Branislav, Radmilović-Radjenović, Marija
Publicado 2020

Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects

por Rašljić Rafajilović, Milena, Radulović, Katarina, Smiljanić, Milče M., Lazić, Žarko, Jakšić, Zoran, Stanisavljev, Dragomir, Radović, Dana Vasiljević
Publicado 2020