Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate

por Lee, Jun-Myeong, Lee, Jong-Chan, Kim, Seong-In, Lee, Seung-Jae, Bae, Jae-Yung, Park, Jin-Hyung, Park, Jea-Gun
Publicado 2022

Scavenger with Protonated Phosphite Ions for Incredible Nanoscale ZrO(2)-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical–Mechanical Planarizati...

por Kim, Seong-In, Jeong, Gi-Ppeum, Lee, Seung-Jae, Lee, Jong-Chan, Lee, Jun-Myeong, Park, Jin-Hyung, Bae, Jae-Young, Park, Jea-Gun
Publicado 2021