SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

por Nordström, Maria, Keller, Stephan, Lillemose, Michael, Johansson, Alicia, Dohn, Søren, Haefliger, Daniel, Blagoi, Gabriela, Havsteen-Jakobsen, Mogens, Boisen, Anja
Publicado 2008