Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology

por Wang, Chien-Ping, Lin, Burn Jeng, Shih, Jiaw-Ren, Chih, Yue-Der, Chang, Jonathan, Lin, Chrong Jung, King, Ya-Chin
Publicado 2021

Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses

por Wu, Jia-Rong, Lin, Ting-An, Wu, Yan-Ru, Chen, Po-Hsiung, Gau, Tsi-Sheng, Lin, Burn-Jeng, Chiu, Po-Wen, Liu, Rai-Shung
Publicado 2023

Embedded Micro-detectors for EUV Exposure Control in FinFET CMOS Technology

por Wang, Chien-Ping, Lin, Burn Jeng, Wu, Pin-Jiun, Shih, Jiaw-Ren, Chih, Yue-Der, Chang, Jonathan, Lin, Chrong Jung, King, Ya-Chin
Publicado 2022