A High Sensitivity Electric Field Microsensor Based on Torsional Resonance

por Chu, Zhaozhi, Peng, Chunrong, Ren, Ren, Ling, Biyun, Zhang, Zhouwei, Lei, Hucheng, Xia, Shanhong
Publicado 2018

Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference

por Ling, Biyun, Peng, Chunrong, Ren, Ren, Chu, Zhaozhi, Zhang, Zhouwei, Lei, Hucheng, Xia, Shanhong
Publicado 2018

An Electric Field Microsensor with Mutual Shielding Electrodes

por Lei, Hucheng, Xia, Shanhong, Chu, Zhaozhi, Ling, Biyun, Peng, Chunrong, Zhang, Zhouwei, Liu, Jun, Zhang, Wei
Publicado 2021