Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

por Kluba, Marta Maria, Li, Jian, Parkkinen, Katja, Louwerse, Marcus, Snijder, Jaap, Dekker, Ronald
Publicado 2021

A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

por Savov, Angel, Joshi, Shivani, Shafqat, Salman, Hoefnagels, Johan, Louwerse, Marcus, Stoute, Ronald, Dekker, Ronald
Publicado 2018