Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data

por Yang, Yu-Pu, Lu, Te-Yun, Lo, Hsiao-Han, Chen, Wei-Lun, Wang, Peter J., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Publicado 2021