Ion-Beam-Induced Atomic Mixing in Ge, Si, and SiGe, Studied by Means of Isotope Multilayer Structures

por Radek, Manuel, Liedke, Bartosz, Schmidt, Bernd, Voelskow, Matthias, Bischoff, Lothar, Lundsgaard Hansen, John, Nylandsted Larsen, Arne, Bougeard, Dominique, Böttger, Roman, Prucnal, Slawomir, Posselt, Matthias, Bracht, Hartmut
Publicado 2017