Controllable Fabrication of Vertical Graphene with Tunable Growth Nature by Remote Plasma-Enhanced Chemical Vapor Deposition

por Zhang, Tian-Tian, Lv, Bing-Hao, Fan, Chen-Chen, Shi, Bi-Yun, Cao, Qiao-Jun, Wang, Wei, Tao, Fei-Fei, Dou, Wei-Dong
Publicado 2023