Nanoindentation of Chromium Oxide Possessing Superior Hardness among Atomic-Layer-Deposited Oxides

por Jõgiaas, Taivo, Tarre, Aivar, Mändar, Hugo, Kozlova, Jekaterina, Tamm, Aile
Publicado 2021

Hardness, Modulus, and Refractive Index of Plasma-Assisted Atomic-Layer-Deposited Hafnium Oxide Thin Films Doped with Aluminum Oxide

por Kull, Mikk, Piirsoo, Helle-Mai, Tarre, Aivar, Mändar, Hugo, Tamm, Aile, Jõgiaas, Taivo
Publicado 2023

Mechanical and Optical Properties of Cr(2)O(3) Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)(3) and Ozone

por Salari Mehr, Mahtab, Aarik, Lauri, Jõgiaas, Taivo, Kasikov, Aarne, Damerchi, Elyad, Mändar, Hugo
Publicado 2023