From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity†

por Mackus, Adriaan J. M., Merkx, Marc J. M., Kessels, Wilhelmus M. M.
Publicado 2018

Atomic Layer Deposition of Cobalt Using H(2)-, N(2)-, and NH(3)-Based Plasmas: On the Role of the Co-reactant

por Vos, Martijn F. J., van Straaten, Gerben, Kessels, W. M. M. Erwin, Mackus, Adriaan J. M.
Publicado 2018

Reaction Mechanisms during Atomic Layer Deposition of AlF(3) Using Al(CH(3))(3) and SF(6) Plasma

por Vos, Martijn F. J., Knoops, Harm C. M., Kessels, Wilhelmus M. M., Mackus, Adriaan J. M.
Publicado 2021

Area-Selective Atomic Layer Deposition of SiO(2) Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

por Mameli, Alfredo, Merkx, Marc J. M., Karasulu, Bora, Roozeboom, Fred, Kessels, Wilhelmus (Erwin) M. M., Mackus, Adriaan J. M.
Publicado 2017

Area-Selective Atomic Layer Deposition of Two-Dimensional WS(2) Nanolayers

por Balasubramanyam, Shashank, Merkx, Marc J. M., Verheijen, Marcel A., Kessels, Wilhelmus M. M., Mackus, Adriaan J. M., Bol, Ageeth A.
Publicado 2020

Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area Activation

por Mameli, Alfredo, Kuang, Yinghuan, Aghaee, Morteza, Ande, Chaitanya K., Karasulu, Bora, Creatore, Mariadriana, Mackus, Adriaan J. M., Kessels, Wilhelmus M. M., Roozeboom, Fred
Publicado 2017

Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices

por Gerritsen, Sven H., Chittock, Nicholas J., Vandalon, Vincent, Verheijen, Marcel A., Knoops, Harm C. M., Kessels, Wilhelmus M. M., Mackus, Adriaan J. M.
Publicado 2022

Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation

por Singh, Joseph A., Thissen, Nick F. W., Kim, Woo-Hee, Johnson, Hannah, Kessels, Wilhelmus M. M., Bol, Ageeth A., Bent, Stacey F., Mackus, Adriaan J. M.
Publicado 2017

Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors

por Merkx, Marc J. M., Angelidis, Athanasios, Mameli, Alfredo, Li, Jun, Lemaire, Paul C., Sharma, Kashish, Hausmann, Dennis M., Kessels, Wilhelmus M. M., Sandoval, Tania E., Mackus, Adriaan J. M.
Publicado 2022