Unraveling structural and compositional information in 3D FinFET electronic devices

por Trombini, Henrique, Marmitt, Gabriel Guterres, Alencar, Igor, Baptista, Daniel Lorscheitter, Reboh, Shay, Mazen, Frédéric, Pinheiro, Rafael Bortolin, Sanchez, Dario Ferreira, Senna, Carlos Alberto, Archanjo, Bráulio Soares, Achete, Carlos Alberto, Grande, Pedro Luis
Publicado 2019