Low temperature plasma enhanced CVD epitaxial growth of silicon on GaAs: a new paradigm for III-V/Si integration

por Cariou, Romain, Chen, Wanghua, Maurice, Jean-Luc, Yu, Jingwen, Patriarche, Gilles, Mauguin, Olivia, Largeau, Ludovic, Decobert, Jean, Roca i Cabarrocas, Pere
Publicado 2016