Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas

por Middelburg, Luke M., Ghaderi, Mohammadamir, Bilby, David, Visser, Jaco H., Zhang, Guo Qi, Lundgren, Per, Enoksson, Peter, Wolffenbuttel, Reinoud F.
Publicado 2019

Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

por Romijn, Joost, Vollebregt, Sten, Middelburg, Luke M., Mansouri, Brahim El, van Zeijl, Henk W., May, Alexander, Erlbacher, Tobias, Leijtens, Johan, Zhang, Guoqi, Sarro, Pasqualina M.
Publicado 2022

High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

por El Mansouri, Brahim, Middelburg, Luke M., Poelma, René H., Zhang, Guo Qi, van Zeijl, Henk W., Wei, Jia, Jiang, Hui, Vogel, Johan G., van Driel, Willem D.
Publicado 2019