High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy

por Nagamatsu, Kentaro, Miyagawa, Takumi, Tomita, Atsushi, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki
Publicado 2023

Investigation of V/III ratio dependencies for optimizing AlN growth during reduced parasitic reaction in metalorganic vapor phase epitaxy

por Tomita, Atsushi, Miyagawa, Takumi, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki, Nagamatsu, Kentaro
Publicado 2023

Reduction of parasitic reaction in high-temperature AlN growth by jet stream gas flow metal–organic vapor phase epitaxy

por Nagamatsu, Kentaro, Tsuda, Shota, Miyagawa, Takumi, Aono, Reiya, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki
Publicado 2022