Tunable plasmonic resonances in Si-Au slanted columnar heterostructure thin films

por Kılıç, Ufuk, Mock, Alyssa, Feder, René, Sekora, Derek, Hilfiker, Matthew, Korlacki, Rafał, Schubert, Eva, Argyropoulos, Christos, Schubert, Mathias
Publicado 2019

Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

por Kilic, Ufuk, Mock, Alyssa, Sekora, Derek, Gilbert, Simeon, Valloppilly, Shah, Melendez, Giselle, Ianno, Natale, Langell, Marjorie, Schubert, Eva, Schubert, Mathias
Publicado 2020

Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

por Kilic, Ufuk, Mock, Alyssa, Sekora, Derek, Gilbert, Simeon, Valloppilly, Shah, Melendez, Giselle, Ianno, Natale, Langell, Marjorie, Schubert, Eva, Schubert, Mathias
Publicado 2021