High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

por Yoo, Daehan, Nguyen, Ngoc-Cuong, Martin-Moreno, Luis, Mohr, Daniel A., Carretero-Palacios, Sol, Shaver, Jonah, Peraire, Jaime, Ebbesen, Thomas W., Oh, Sang-Hyun
Publicado 2016