Surface Stoichiometry and Depth Profile of Ti(x)-Cu(y)N(z) Thin Films Deposited by Magnetron Sputtering

por Mukhopadhyay, Arun Kumar, Roy, Avishek, Bhattacharjee, Gourab, Das, Sadhan Chandra, Majumdar, Abhijit, Wulff, Harm, Hippler, Rainer
Publicado 2021