Hierarchical Self-Assembly of Thickness-Modulated Block Copolymer Thin Films for Controlling Nanodomain Orientations inside Bare Silicon Trenches

por Shin, Jin Yong, Oh, Young Taek, Kim, Simon, Lim, Hoe Yeon, Lee, Bom, Ko, Young Chun, Park, Shin, Seon, Seung Won, Lee, Se Gi, Mun, Seung Soo, Kim, Bong Hoon
Publicado 2021