Miniaturized CO(2) Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector

por Ng, Doris Keh Ting, Xu, Linfang, Chen, Weiguo, Wang, Huanhuan, Gu, Zhonghua, Chia, Xavier Xujie, Fu, Yuan Hsing, Jaafar, Norhanani, Ho, Chong Pei, Zhang, Tantan, Zhang, Qingxin, Lee, Lennon Yao Ting
Publicado 2022