Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

por Nian, Laixia, Qu, Yuanhang, Gu, Xiyu, Luo, Tiancheng, Xie, Ying, Wei, Min, Cai, Yao, Liu, Yan, Sun, Chengliang
Publicado 2023

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible [Formula: see text]

por Nian, Laixia, Zou, Yang, Gao, Chao, Zhou, Yu, Fan, Yuchen, Wang, Jian, Liu, Wenjuan, Liu, Yan, Soon, Jeffrey Bowoon, Cai, Yao, Sun, Chengliang
Publicado 2022