Effect of Electrode Material on the Crystallization of GeTe Grown by Atomic Layer Deposition for Phase Change Random Access Memory

por Oh, Seung Ik, Im, In Hyuk, Yoo, Chanyoung, Ryu, Sung Yeon, Kim, Yong, Choi, Seok, Eom, Taeyong, Hwang, Cheol Seong, Choi, Byung Joon
Publicado 2019